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Programmable Micro-Optics Components
A. Marrakchi, S. F. Habiby, and J. R. Wullert II
Micro-lenses and micro-gratings are now routinely fabricated on a variety of substrates such as glass and semiconductors using well-established photolithographic techniques. These optical components are so small that they can be arranged in large two-dimensional arrays for use in a variety of applications in image processing and parallel interconnections. Our aim is to make these micro-optic components programmable. For this purpose, we have suggested and demonstrated the use of addressable two-dimensional spatial light modulators (SLMs).
Publish Date: 01 December 1991