Nanofabrication technology has made significant progress more recently, and it is now possible to further scale MEMS down to nanoelectromechanical systems (NEMS). The fusion of MEMS/NEMS with nanophotonic elements opens up new possibilities and creates novel, functional photonic devices and systems featuring dynamic tunability, enhanced performance and a higher level of integration.
This edited book describes some of the most recent results in the field of optical MEMS/NEMS and nanophotonics, as well as the emergence of fascinating new devices, systems and applications. In addition to being a source of information on recent photonic MEMS/NEMS devices, this book provides the necessary fundamentals for engineers and researchers interested in micro- and nanofabrication, MEMS/NEMS, micro-optics and nanophotonics.
Review by Lisa Tongning Li, Inphenix, Inc., Livermore, Calif., USA
The opinions expressed in the book review section are those of the reviewer and do not necessarily reflect those of OPN or OSA.