Pilot-line production of Ti:LiNbO3 integrated optical devices

R. A. Becker

During the past three years, the level of effort in Ti: LiNbO3 integrated optical (IO) devices has changed from one or two devices being fabricated at a time in R&D laboratories throughout the world to 10s-100s of devices being fabricated at a time by commercial companies. Standard, multifunction, and custom IO products are available from Crystal Technology Inc. (CTI) as well as other companies. Recently the CTI Integrated Optic Foundry has been made available for customers to design their own IO device and have them fabricated at the Foundry. During this developmental period, the differences between fabricating one device and manufacturing many devices have been evaluated. This paper reviews the basic fabrication steps and discusses the issues that become important when volume manufacturing is considered.

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