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Large Area Epitaxial Gaas and ALxGA1-x as Films on Arbitrary Substrates

E. Yablonovitch

Thin-film semiconductors have always represented a tradeoff between material quality and ease of preparation. Photonic devices require the highest quality epitaxial films, in which the atoms are in exact registry with an underlying crystal. But they must be grown on, and are accompanied by, cumbersome and expensive bulk single crystal wafer substrates.

Publish Date: 01 December 1988