Feature
Optical Lithography in the Extreme UV
As the number of transistors on a chip continues to increase, the industry’s shrinking feature size is outstripping even the best efforts of optical engineers. Extreme ultraviolet lithography can lead to a more-than-tenfold decrease in wavelength, translating to a startling leap in performance.
Semiconductor lithography is the art and science of printing integrated-circuit chips. The central processing unit in a desktop computer was printed using a wide array of capital equipment in a semiconductor fab belonging to a company like Intel or IBM. For leading-edge circuits, the linchpin of manufacturing equipment is a photolithographic wafer scanner, which projects a circuit-pattern image to a silicon wafer.
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