Handbook of Laser Micro- and Nano-Engineering

The value of this book derives from the extensive scope of its contents, which covers laser ablative and additive techniques to modify materials, the production of 2D and 3D devices, and biomedical applications. The key components of these devices are the various types of lasers (wavelength, pulse energy, duration, repetition rate, and energy density at the target) coupled with beam-shaping optical elements.

The book provides an introduction to the techniques for manufacturing processes and inchoate laboratory demonstrations. The detailed discussion of the ASML EUV lithography for the production of semiconductors demonstrates the complexity of the engineering problems that were solved. The chapters on aberrations, beam shaping, Bessel beams and vortex beams, two-photon polymerization, optical tweezers, acoustic emission and ultrasound monitoring in laser micro/nanofabrication are exemplary. The cross-references are helpful. A paucity of discussions on the limitations of the techniques and comparisons with alternative techniques, as well as a scarcity of recent references, is noted.

Review by Barry R. Masters, Fellow of AAAS, Optica, and SPIE.

The opinions expressed in the book review section are those of the reviewer and do not necessarily reflect those of OPN or its publisher, Optica (formerly OSA).

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