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The Meaning and Measure of Lateral Resolution for Surface Profiling Interferometers

Peter de Groot, Xavier Colonna de Lega, Daniel Sykora and Leslie Deck

Optical interferometers for surface characterization provide detailed information about surface topography, and they carry specifications related to the ultimate resolving power for 3-D imaging. It is worthwhile for engineers to understand the meaning of these specifications and the methods for validating them.

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Publish Date: 01 April 2012


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